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Tuesday, November 3, 2020 | History

5 edition of Gas-Phase and Surface Chemistry in Electronic Materials Processing found in the catalog.

Gas-Phase and Surface Chemistry in Electronic Materials Processing

Symposium Held November 29-December 2, 1993, Boston, Massachusetts, U.S.A. (Mate)

by T. J. Mountziaris

  • 268 Want to read
  • 37 Currently reading

Published by Materials Research Society .
Written in English

    Subjects:
  • Surface chemistry,
  • Science,
  • Congresses,
  • Science/Mathematics,
  • Surfaces,
  • SCI013000,
  • SCI,
  • Chemistry - General,
  • Electronics,
  • Materials

  • Edition Notes

    ContributionsF. T. J. Smith (Contributor)
    The Physical Object
    FormatHardcover
    Number of Pages556
    ID Numbers
    Open LibraryOL8608873M
    ISBN 101558992332
    ISBN 109781558992337

    Materials and Processing for Gate Dielectrics on Silicon Carbide (SiC) Surface, Physics and Technology of Silicon Carbide Devices, Yasuto Hijikata, IntechOpen, DOI: / Available from: Sanjeev Kumar Gupta, Jitendra Singh and Jamil Akhtar (October 16th ).Cited by: 7. Electronic Materials & Photonics Division; A discussion of the methods for achieving uniformity in each of these reactors illustrates the differing importance of gas-phase and surface processes. Most of the remainder of the day is devoted to considering the properties of the layers important in IC applications and how they are influenced by. The work function of the tungsten-oxygen system has been investigated at temperatures of , and °C vs. oxygen partial pressure within the stability range of various oxide phases. The Cited by: 8.


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Gas-Phase and Surface Chemistry in Electronic Materials Processing by T. J. Mountziaris Download PDF EPUB FB2

Gas-phase and surface chemistry in electronic materials processing. Pittsburgh, Pa.: Materials Research Society, © (OCoLC) Material Type: Conference publication, Internet resource: Document Type: Book, Internet Resource: All Authors / Contributors: Triantafillos John Mountziaris; Materials Research Society.

University POLITEHNICA of Bucharest, Materials Science and Engineering Faculty, Materials Processing and Ecometallurgy Department, Splaiul Independentei, Bucharest, Romania Vice President of the Romanian Forging Association, Head of QForm Software Training Center Romania. @introbul:Key Features @bul:* This is the first handbook ever published on electronic and photonic materials * 10 volumes summarize the advances in electronic and photonic materials made over past the two decades * This handbook is a unique source of the in-depth knowledge of synthesis, processing, spectroscopy, physical properties and.

Chemical functionalization of ZnO surface with an alkyne functional group was successfully achieved by exposing ZnO nanopowder to gas-phase propiolic acid in vacuum, which left the alkyne group available for subsequent chemical modification via the azide–alkyne cycloaddition “click” reaction with benzyl azide.

The highly selective formation of a bidentate carboxylate linkage and the Cited by: 4. Chemical functionalization of ZnO surface with an alkyne functional group was successfully achieved by exposing ZnO nanopowder to gas-phase propiolic acid in vacuum, which left the alkyne group available for subsequent chemical modification via the azide–alkyne cycloaddition “click” reaction with benzyl azide.

Gas phase ion chemistry is a field of science encompassed within both chemistry and is the science that studies ions and molecules in the gas phase, most often enabled by some form of mass far the most important applications for this science is in studying the thermodynamics and kinetics of reactions.

For example, one application is in studying the thermodynamics of. Publisher Summary. This chapter discusses the gas phase and surface chemistry of the Chemical Vapor Deposition (CVD) of epitaxial silicon. CVD is an important industrial process in the manufacture of thick and thin solid films of advanced electronic and photonic materials.

Carbon-based honeycomb monoliths can be integral or carbon-coated ceramic monoliths, and they take advantage of the versatility of the surface area, pore texture and surface chemistry of carbon materials. Here, we review the preparation methods of these monoliths, Cited by: This book covers a broad spectrum of the silicon-based materials and their device applications.

This book provides a broad coverage of the silicon-based materials including different kinds of silicon-related materials, their processing, spectroscopic characterization, physical properties, and device applications.

Sha and J. Chang, “"Gas-Phase and Surface Reactions in Plasma Enhanced Chemical Etching of High-K Dielectrics”, Thin Film Materials, Processes, and Reliability: Plasma Processing for the nm Node and Copper Interconnects with Low-k Inter Level Dielectric Films Symposium, the rd Meeting of The Electrochemical Society in Paris.

Materials processing with lasers is an expanding field which is captivating the attention of scientists, engineers, and manufacturers alike.

The aspect of most interest to scientists is the basic interac­ tion mechanisms between the intense light of a laser and materials exposed to a chemically reactive or nonreactive surrounding me­. The Supporting Information is available free of charge on the ACS Publications website at DOI: /ter.6b Description of the quadrupole mass spectrometry (QMS) experimental setup, performed measurements, and data analysis; determined mass spectra of the reaction products, including comparison with spectra found in the NIST database; conclusion of which species are likely Cited by: 9.

Physical Chemistry of Cold Gas-Phase Functional Molecules and Clusters Ebata, T. (Ed), Fujii, M. (Ed) () This book describes advanced research on the structures and photochemical properties of polyatomic molecules and molecular clusters having various functionalities under cold.

@article{osti_, title = {MOLECULAR SPECTROSCPY AND REACTIONS OF ACTINIDES IN THE Gas-Phase and Surface Chemistry in Electronic Materials Processing book PHASE AND CRYOGENIC MATRICES}, author = {Heaven, Michael C and Gibson, John K and Marcalo, Joaquim}, abstractNote = {In this chapter we review the spectroscopic data for actinide molecules and the reaction dynamics for atomic and molecular actinides that have been examined in.

Kinetic descriptions for electrons, ions, and neutrals in materials processing plasmas are required for modeling both gas-phase and surface chemistry and understanding the effects of complex reactor geometry. Hybrid models that combine analytical, fluid, and kinetic approaches are likely to be effective for use in CAD tools and expert systems.

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variables that describe state of gaseous sample. pressure volume temperature moles. pressure exerted by evaporated particles above surface of a liquid. Vapor pressure from the evaporated molecules forces. Such interactions may control the outcome of processes such as etching, surface-chemistry modification, and materials degradation on spacecraft.

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Ingle, NK, Theodoropoulos, C & Mountziaris, TJKINETICS OF LOW-PRESSURE MOCVD OF GAAS FROM TRIETHYL-GALLIUM AND ARSINE. in TJ Mountziaris, GR PazPujalt, FTJ Smith & PR Westmoreland (eds), GAS-PHASE AND SURFACE CHEMISTRY IN ELECTRONIC MATERIALS PROCESSING. vol.

MATERIALS RESEARCH SOCIETY SYMPOSIUM PROCEEDINGS, Author: Ingle Nk, Theodoropoulos C, Mountziaris Tj, Wexler Rm, Smith Ftj. Gas-phase spectroscopy lends itself ideally to the study of isolated molecules and provides important data for comparison with theory.

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